Ultrasonic vibration millgrinding of singlecrystal ...
1. Introduction. Singlecrystal silicon carbide (SiC) is a promising sensor material for harshenvironment applications due to its mechanical robustness and chemical inertness at elevated temperatures .In addition, the excellent electrical characteristics of single crystal SiC feature a wide bandgap, a highbreakdown electric field, and a low leakage current, making it a good candidate to ...